UBC / DBC Series
Ultra-High Purity TEE Block Bellows Valves
Utilises all HB parts and advantages of the standard UHP bellows valve for semiconductor applications, combined with the lowest dead space within any UHP globe valve on the market.
Key Features
Available in line sizes up to 4” main / 1 ½” branch
Metal-to-metal external seals
Minimal dead space
Multi-ply bellow construction for high durability
Typical Applications
Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Manual or pneumatic |
| Inconel625 bellows |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Multiple block orientations and configurations (DBV etc) |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
375p.s.i. operating pressure |
10.2 – 16.6 Cv (flow coefficient) |