RG Regulator Series
Ultra-High Purity Regulators
Carten regulators now used with every equipment manufacturer and chipmaker in the world, available in multiple flow rate and pressure ranges for all gas types
![RG Regulators Series 1 Regulator](https://www.cartencontrols.com/wp-content/uploads/2023/11/Regulator-761x385.png)
Key Features
Available in line sizes up to 1”
Metal-to-metal external seals
Multiple inlet and outlet pressure ranges
Meets all hysteresis and droop standards
Typical Applications
High performance and precise pressure control in point-of-use and medium flow gas systems, gas-mixing systems, valve manifold boxes (VMB), gas mixing panels, high durability vacuum service, tool hook-up pressure control and stage-down, ultra-high-purity gas control for point-of-use service, gas sticks, and critical application containment functionality.
Key Specifications
Materials of Construction | Cleanliness | Specifications | Options |
---|---|---|---|
316L stainless body |
Manufactured in Class 100 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Gauges – upstream, downstream |
316L poppet and components |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature |
Bar 316L material |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Multiple inlet and outlet pressure ranges |
PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
250p.s.i. operating pressure |
Multiple inlet and outlet flow rate ranges |