HF Series
Ultra-High Purity High Flow Bellows Valves
UHP bellows globe valve for semiconductor applications containing all the advantages of our HB standard series, with extended valve stroke to deliver the highest flow rates, with minimum pressure drop, in the semiconductor industry.
Key Features
Available in line sizes up to 12”
Metal-to-metal external seals
Highest Cv (flow coefficient) in semiconductor industry
Multi-ply bellow construction for high durability
Typical Applications
High flow bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, high flow ultra-high-purity gas control for filtration and purification, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Manual or pneumatic |
| Inconel 625 or bellows 316Ti |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
4/20mA switching / signalling automation |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
375p.s.i. operating pressure |
5 - 2000 Cv (flow coefficient) |