Gas Sticks
Ultra-High Purity Process Control Manifold
Low and ultra-high-purity options fully manufactured at Carten to ensure precise point-of-use pressure control for semiconductor tools – can be supplied as an all-Carten assembly, or with specified third-party components.
Key Features
Available in line sizes up to 1”
High-flow regulator as standard option
Filter and gauge as standard
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Tool hook-up pressure control, tool hook-up shut-off, ultra-high-purity gas control for point-of-use service, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless wetted area |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Component brands |
| Elgiloy Diaphragm |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
Gauge, and gauge positions |
| Component barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Filter at point-of-use |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
100p.s.i. operating pressure |
High or Low Purity |