Gas Mixing Panels
Ultra-High Purity Gas Mixing Panels
Contract-manufactured to specified semiconductor equipment tool requirements, using all-Carten or specified third-party components, including both mechanical and electrical functionality, fully validated / FAT at Carten to provide turnkey product to customer.
Key Features
Smallest footprint possible from P&ID
FAT/ Validation to ensure plug & play supply
Components manufactured and integration (welding, cleanroom assembly etc) completed on site
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Precise gas mixing, ultra-high-purity gas control, gas control for ALD, CVD, MOCVD, Lithography, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless wetted area |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
MFC calibration |
| UHP tubing and fittings |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
Carten or third-party components |
| Component barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Full FAT, basic mechanical assembly |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
100p.s.i. operating pressure |
Single or double-melt components |