Bulk Gas Distribution Laterals / Spools
Ultra-High Purity Laterals
Low and ultra-high-purity options fully manufactured at Carten to ensure clean UHP gas transfer from bulk gas filtration through lateral POCS to semiconductor tools – can be supplied as an all-Carten assembly, or with specified third-party components.
Key Features
Available in line sizes up to 6”
UPC, DPC, SPDST, or Pulled TEE options
Lowest dead space design in industry
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless wetted area |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Manual or pneumatic, LOTO failsafe configurations |
| Elgiloy Diaphragm |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
| Component barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Multiple block orientations and configurations (DPV etc) |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
375p.s.i. operating pressure |
2.5 - 9.0 Cv (flow coefficient) |