Bulk Gas Distribution Laterals / Spools
Ultra-High Purity Laterals
Low and ultra-high-purity options fully manufactured at Carten to ensure clean UHP gas transfer from bulk gas filtration through lateral POCS to semiconductor tools – can be supplied as an all-Carten assembly, or with specified third-party components.
![Bulk Gas Distribution Laterals / Spools 1 Bulk Gas Distribution Laterals Spools](https://www.cartencontrols.com/wp-content/uploads/2023/11/Bulk-Gas-Distribution-Laterals-Spools-761x385.png)
Key Features
Available in line sizes up to 6”
UPC, DPC, SPDST, or Pulled TEE options
Lowest dead space design in industry
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.
Key Specifications
Materials of Construction | Cleanliness | Specifications | Options |
---|---|---|---|
316L stainless wetted area |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Manual or pneumatic, LOTO failsafe configurations |
Elgiloy Diaphragm |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
Component barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Multiple block orientations and configurations (DPV etc) |
PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
375p.s.i. operating pressure |
2.5 - 9.0 Cv (flow coefficient) |